Title :
Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer
Author :
Ye, Jia-Sheng ; Matsuyama, Naoki ; Kanamori, Yoshiaki ; Hane, Kazuhiro
Author_Institution :
Tohoku Univ., Sendai
fDate :
5/15/2008 12:00:00 AM
Abstract :
In this letter, a silicon suspended grating without a substrate is fabricated using micro- and nanolithography technologies. Experimental measurements reveal that it serves as a microoptical filter, which is due to guided mode resonance effect of the grating. Theoretical calculations by a rigorous coupled wave method prove to be in agreement with the experimental observations.
Keywords :
elemental semiconductors; integrated optoelectronics; micro-optics; nanolithography; optical fabrication; optical filters; silicon; Si; coupled wave method; guided mode resonance; microlithography; microoptical filter; nanolithography; resonant grating filters; silicon suspended grating; silicon-on-insulator wafer; Etching; Fabrication; Gratings; Nanolithography; Optical filters; Photonic crystals; Reflectivity; Resonance; Silicon on insulator technology; Slabs; Guided mode resonance; micro- and nanolithography technologies; microoptical filter; rigorous coupled wave method;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2008.921840
