DocumentCode
1139408
Title
Technique for measurements of semiconductor devices between 2 and 300 K
Author
Kindl, Ottmar W. ; Langheinrich, Werner A.
Author_Institution
Inst. of Semicond. Electron., Tech. Univ. of Darmstadt, West Germany
Volume
36
Issue
8
fYear
1989
fDate
8/1/1989 12:00:00 AM
Firstpage
1536
Lastpage
1541
Abstract
A computer-controlled test measurement setup that permits full automatic acquisition of device characteristics in the temperature range from 2 to 300 K is described. The required equipment, the special construction of a suitable cold work area inside of a helium dewar, and a typical cooling procedure are discussed in detail. Typical measurement data give an idea of the studies of device behaviour versus temperature that are possible with the test assembly
Keywords
automatic test equipment; low-temperature techniques; semiconductor device testing; 2 to 300 K; automatic acquisition; cold work area; computer-controlled test measurement; cooling procedure; semiconductor devices; Assembly; Blades; Electronic equipment testing; Helium; Laboratories; Nitrogen; Readout electronics; Semiconductor device measurement; Semiconductor devices; Temperature;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.30967
Filename
30967
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