A circuit model for nonlinear simulation of radio-frequency filters using bulk acoustic wave resonators

This paper describes a circuit model for the analysis of nonlinearity in the filters based on radio- frequency (RF) bulk acoustic wave (BAW) resonators. The nonlinear output is expressed by a current source connected parallel to the linear resonator. Amplitude of the nonlinear current source is programmed proportional to the product of linear currents flowing in the resonator. Thus, the nonlinear analysis is performed by the common linear analysis, even for complex device structures. The analysis is applied to a ladder-type RF BAW filter, and frequency dependence of the nonlinear output is discussed. Furthermore, this analysis is verified through comparison with experiments.