DocumentCode
1141298
Title
All-epitaxial current- and mode-confined AlGaAs/GaAs VCSEL
Author
Lu, D. ; Ahn, J. ; Deppe, D.G.
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Texas, Austin, TX, USA
Volume
40
Issue
21
fYear
2004
Firstpage
1336
Lastpage
1337
Abstract
An all-epitaxial current- and mode-confining vertical-cavity surface-emitting laser is demonstrated that eliminates the need for any post-growth oxidation step. The current and optical mode are self-aligned and confined to the same lithographically defined area in an AlGaAs cavity.
Keywords
III-V semiconductors; aluminium compounds; gallium arsenide; semiconductor epitaxial layers; semiconductor lasers; surface emitting lasers; AlGaAs-GaAs; VCSEL; all-epitaxial current vertical-cavity surface-emitting laser; lithography; mode-confining vertical-cavity surface emitting laser; optical mode; post-growth oxidation; vertical-cavity surface-emitting laser;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20046159
Filename
1344885
Link To Document