Title :
Micro-automating semiconductor fabrication
Author :
Busch-Vishniac, Ilene J.
Author_Institution :
Dept. of Mech. Eng., Texas Univ., Austin, TX, USA
fDate :
7/1/1991 12:00:00 AM
Abstract :
Progress in automating very-small-scale mechanical processes is reviewed. The special requirements of microautomation are identified, and three applications are examined. They are positioning, electrical probing, and mechanical probing. The architecture and design of a microautomation system are described. Microsensors and microactuators are discussed. The use of magnetics technology for driving the microautomation system is reported, and a precision workspace for demonstrating a microautomation system is described. Also described are a coarse/fine positioner and a linear transport path capable of moving the fine manipulator from one precision-demanding area to another.<>
Keywords :
electric actuators; electric sensing devices; integrated circuit manufacture; position control; semiconductor device manufacture; coarse/fine positioner; electrical probing; linear transport path; magnetics technology; manipulator; mechanical probing; microactuators; microautomation system; microsensors; positioning; semiconductor fabrication; Automatic control; Biomedical optical imaging; Fabrication; High speed optical techniques; Manufacturing automation; Microelectronics; Optical sensors; Particle beam optics; Payloads; Robots;
Journal_Title :
Circuits and Devices Magazine, IEEE
