Title :
Resonant sensor for high accuracy pressure measurement using silicon technology
Author :
Parsons, P. ; Glendinning, A. ; Angelidis, D.
Author_Institution :
Schlumberger Ind., Farnborough, UK
fDate :
7/1/1992 12:00:00 AM
Abstract :
A resonant-element transducer developed for aerospace applications using micromachined silicon technology is described. The sensor is a beam supported over a square diaphragm. The resonant frequency of the beam is proportional to the applied pressure on the diaphragm. Results presented show that the prototype´s performance rivals that of current high-accuracy pressure transducers.<>
Keywords :
aerospace instrumentation; electric sensing devices; elemental semiconductors; pressure measurement; pressure transducers; resonators; silicon; Si; aerospace applications; finite element model; pressure hysteresis; pressure measurement; pressure transducers; quality factors; resonant frequency; resonant-element transducer; square diaphragm; Aerospace industry; Engine cylinders; Manufacturing; Mechanical sensors; Pressure measurement; Resonance; Resonant frequency; Sensor phenomena and characterization; Silicon; Transducers;
Journal_Title :
Aerospace and Electronic Systems Magazine, IEEE
