Title :
Progress in Chip-Scale Photonic Sensing
Author :
Jokerst, N.M. ; Lin Luan ; Palit, Sarbani ; Royal, M. ; Dhar, S. ; Brooke, M. ; Tyler, Talmage
Author_Institution :
Dept. of Electr. & Comput. Eng., Duke Univ., Durham, NC, USA
Abstract :
Chip-scale integrated planar photonic sensing systems for portable diagnostics and monitoring are emerging, as photonic components are integrated into systems with silicon (Si), Si complementary metal-oxide semiconductor, and fluidics. This paper reviews progress in these areas. Medical and environmental applications, candidate photonic sensors, integration methodologies, integrated subsystem demonstrations, and challenges facing this emerging field are discussed in this paper.
Keywords :
MIS devices; elemental semiconductors; integrated optics; integrated optoelectronics; optical sensors; portable instruments; silicon; Si; candidate photonic sensors; chip-scale integrated planar photonic sensing system; complementary metal-oxide semiconductor; integrated subsystem demonstrations; integration methodologies; portable diagnostics; portable monitoring; Biomedical monitoring; Costs; Diseases; Medical diagnostic imaging; Optical sensors; Optoelectronic and photonic sensors; Photonic integrated circuits; Sensor systems; Silicon; Water resources; Chip-scale sensing; chip-scale systems; heterogeneous integration; hybrid integration; integrated lasers; integrated sensing; integrated sensors; interferometers; microresonators; optical integration; optoelectronic integration; photodetectors; planar photonic system; planar photonics; sensing;
Journal_Title :
Biomedical Circuits and Systems, IEEE Transactions on
DOI :
10.1109/TBCAS.2009.2020693
