Title :
Multisensor microsystem for pulmonary function diagnostics
Author :
Van Putten, Anton F P ; Van Putten, Michael J A M ; Van Putten, Maurice H P M ; Van Putten, Pascal F A M
Author_Institution :
AnMar Res. Lab., Eindhoven, Netherlands
fDate :
12/1/2002 12:00:00 AM
Abstract :
A multisensor microsystem for general lung diagnostics is presented. The microsystem measures peak expiratory flow, temperature, pressure, and relative humidity. Solid-state technology provides an integrated multisensor solution applying silicon MEMS technology. Prototypes implemented on two silicon chips show promising results in their application to flow measurement in a healthy volunteer. Calibration issues are briefly discussed.
Keywords :
biomedical measurement; elemental semiconductors; flow measurement; humidity measurement; humidity sensors; lung; microsensors; patient diagnosis; pneumodynamics; pressure measurement; pressure sensors; silicon; temperature measurement; temperature sensors; Si; Si MEMS technology; Si chips; calibration issues; expiratory flow; flow measurement; general lung diagnostics; healthy volunteer; integrated multisensor solution; multisensor microsystem; pulmonary function diagnostics; relative humidity; solid-state technology; Fluid flow measurement; Humidity measurement; Lungs; Micromechanical devices; Pressure measurement; Prototypes; Semiconductor device measurement; Silicon; Solid state circuits; Temperature;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2002.807492
