DocumentCode :
1142792
Title :
Surface-micromachined MEMS acoustic sensor with bottom electrode anchor
Author :
Lee, J. ; Kim, H.J. ; Lee, S.Q. ; Lee, S.K. ; Ko, S.C. ; Park, K.H.
Volume :
44
Issue :
9
fYear :
2008
Firstpage :
576
Lastpage :
577
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:20080401
Filename :
4497336
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1142792
