Coordinated motion control of moving gantry stages for precision applications based on an observer-augmented composite controller

Author

Tan, K.K. ; Lim, S.Y. ; Huang, S. ; Dou, H.F. ; Giam, T.S.

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore

Volume

12

Issue

6

fYear

2004

Firstpage

984

Lastpage

991

Abstract

High-precision operation in gantry systems is required to meet higher demands on positioning accuracy in a wide range of applications such as circuit assembly, precision metrology, and wafer stepping. In this paper, the experimental study of an observer-augmented composite control scheme for coordinated motion control of moving gantry stages for precision applications is presented. The scheme will be implemented and compared to other control schemes currently available for this purpose, including a master-slave and a set-point coordinated scheme. Experimental results will illustrate the enhanced performance of the fully coordinated control scheme with respect to tight trajectory tracking purposes.

Keywords

electrical products industry; electron device manufacture; motion control; observers; position control; precision engineering; circuit assembly; coordinated motion control; gantry systems; master-slave scheme; observer-augmented composite controller; precision metrology; set-point coordinated scheme; trajectory tracking purpose; wafer stepping; Assembly systems; Circuits; Control systems; Manufacturing; Master-slave; Metrology; Motion control; Permanent magnet motors; Tracking; Trajectory; Disturbance observer; fully coordinated control; master–slave control; moving gantry stages; set-point coordinated control;

fLanguage

English

Journal_Title

Control Systems Technology, IEEE Transactions on

Publisher

ieee

ISSN

1063-6536

Type

jour

DOI

10.1109/TCST.2004.833608

Filename

1347185