Title :
A methodology for laser-based thermal diffusivity measurement of advanced multichip module ceramic materials
Author :
Kehoe, L. ; Kelly, P.V. ; O´Connor, G.M. ; O´Reilly, M. ; Crean, G.M.
Author_Institution :
Nat. Microelectron. Res. Centre, Cork, Ireland
Abstract :
Alumina derivative ceramics and low temperature co-fired ceramic (LTCC) electronic multichip module (MCM) packaging substrates have been characterized using single- and double-sided inspection laser flash thermal diffusivity measurement techniques. The paper highlights problems associated with both the measurement system and associated data analysis for the single-sided measurement, and these data are evaluated with reference to that measured by an existing (double sided inspection) standard laser flash method. Finally, a preliminary single-sided measurement methodology is proposed.
Keywords :
ceramics; inspection; measurement by laser beam; multichip modules; radiometry; thermal diffusivity; alumina derivative ceramics; ceramic materials; double-sided inspection; laser-based thermal diffusivity measurement; low temperature co-fired ceramic; multichip module; radiometry; single-sided inspection; Ceramics; Dielectric loss measurement; Dielectric materials; Dielectric substrates; Electronic packaging thermal management; Inspection; Measurement standards; Multichip modules; Optical materials; Temperature;
Journal_Title :
Components, Packaging, and Manufacturing Technology, Part A, IEEE Transactions on