Title :
Electrothermal characteristics of strained-Si MOSFETs in high-current operation
Author :
Choi, Chang-Hoon ; Chun, Jung-Hoon ; Dutton, Robert W.
Author_Institution :
Center for Integrated Syst., Stanford Univ., CA, USA
Abstract :
The electrothermal characteristics of strained-Si MOSFETs, operating in the high-current regime, have been studied using device simulation. The phonon mean-free-path of strained-Si devices in the presence of high electric fields is determined, based on fullband Monte Carlo device simulation. Strained-Si nMOS devices have higher bipolar current gain and impact ionization rates compared to bulk-Si nMOS devices due to the smaller energy bandgap and longer phonon mean-free-path. Even though strained-Si devices have self-heating problems due to the lower thermal conductivity of the buried SiGe layer, the devices can be used beneficially for electrostatic discharge protection devices to achieve lower holding voltage (Vh) and higher second breakdown triggering current (It2), compared to those of bulk-Si devices, owing to the high bipolar current gain and current uniformity.
Keywords :
Ge-Si alloys; MOSFET; Monte Carlo methods; electrostatic discharge; elemental semiconductors; impact ionisation; phonons; semiconductor device breakdown; semiconductor device models; semiconductor materials; silicon; ESD; MOSFET high-current operation; Si-SiGe; bipolar current gain; buried layer thermal conductivity; current uniformity; electrostatic discharge protection devices; energy bandgap; fullband Monte Carlo device simulation; high electric fields; holding voltage; impact ionization rate; nMOS device electrothermal characteristics; phonon mean-free-path; second breakdown triggering current; self-heating; strained-Si MOSFET; Breakdown voltage; Electrothermal effects; Impact ionization; MOS devices; MOSFETs; Monte Carlo methods; Phonons; Photonic band gap; Silicon germanium; Thermal conductivity; Bipolar current gain; ESD; SiGe; device simulation; electrostatic discharge; fullband Monte Carlo simulation; phonon mean-free-path; self-heating problem; strained-Si MOS;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2004.836542