DocumentCode
1146583
Title
Flying height measurement metrology for ultra-low spacing in rigid magnetic recording
Author
Li, Yufeng ; Menon, Aric
Author_Institution
Samsung Inf. Syst. Americ, San Jose, CA, USA
Volume
32
Issue
1
fYear
1996
fDate
1/1/1996 12:00:00 AM
Firstpage
129
Lastpage
134
Abstract
Flying height measurement metrology is presented for ultra-low spacing in rigid magnetic recording. The issues related to the intensity interferometric flying height measurement method are studied. This includes the flying height measurement shift induced by slider material, the dependence of slider optical constants on measurement angle of incidence and location, flying height measurement repeatability, flying height tester calibration, and the effect of the glass disk
Keywords
height measurement; light interferometry; magnetic recording; optical constants; spatial variables measurement; flying height measurement metrology; glass disk; intensity interferometric method; repeatability; rigid magnetic recording; slider optical constants; tester calibration; ultra-low spacing; Calibration; Glass; Goniometers; Magnetic materials; Magnetic recording; Materials testing; Metrology; Optical interferometry; Optical materials; Optical recording;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.477562
Filename
477562
Link To Document