DocumentCode
1147082
Title
Analytic model for the post-breakdown conductance of sub-5-nm SiO2 gate oxides
Author
Miranda, E.
Author_Institution
Dept. d´´Enginyeria Electron., Univ. Autonoma de Barcelona, Bellaterra, Spain
Volume
26
Issue
9
fYear
2005
Firstpage
673
Lastpage
675
Abstract
A new model for the post-breakdown conductance of ultrathin gate oxides based on the generalized diode equation is presented. The model is expressed in terms of the Lambert W function, that is, the inverse of the function w→wew. We show that this alternative formulation improves a previous one, the quantum point contact model, especially in the low bias range, where the role played by the semiconductor electrodes cannot be overlooked. The practical implementation of the proposed equations is discussed.
Keywords
electric admittance; nanocontacts; quantum point contacts; semiconductor device breakdown; semiconductor diodes; silicon compounds; Lambert W function; MOS; SiO2; analytic model; generalized diode equation; nanometer-scale SiO2 gate oxide; post-breakdown conductance; quantum point contact model; reliability; semiconductor electrode; ultrathin gate oxide; Breakdown voltage; Circuit simulation; Electric breakdown; Electrodes; Equations; Insulation; Leakage current; Metal-insulator structures; Semiconductor diodes; Wire; Breakdown; MOS; reliability;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2005.853634
Filename
1498995
Link To Document