Calibrated waveform measurement with high-impedance probes

Author

Kabos, Pavel ; Reader, Howard Charles ; Arz, Uwe ; Williams, Dylan F.

Author_Institution

Nat. Inst. of Stand. & Technol., Boulder, CO, USA

Volume

51

Issue

2

fYear

2003

Firstpage

530

Lastpage

535

Abstract

We develop an on-wafer waveform calibration technique that combines a frequency-domain mismatch correction to account for the effects of the probe on the measurement with an oscilloscope calibration. The mismatch correction is general and can be applied to any type of microwave probe, including scanning and internal-node probes for noninvasive integrated-circuit tests. We show that, for the commercial high-impedance probe we used, this calibration approach allows accurate on-wafer waveform reconstruction for a variety of probe ground configurations.

Keywords

MMIC; calibration; coplanar transmission lines; coplanar waveguides; electric impedance; error correction; frequency-domain analysis; integrated circuit testing; microwave measurement; oscilloscopes; probes; calibrated waveform measurement; frequency-domain mismatch correction; high-impedance probe; high-impedance probes; internal-node probes; microwave probe; noninvasive integrated-circuit tests; on-wafer waveform calibration technique; on-wafer waveform reconstruction; oscilloscope calibration; probe effects; probe ground configurations; scanning probes; Calibration; Coplanar waveguides; Distortion; Integrated circuit measurements; Microwave measurements; Microwave theory and techniques; Oscilloscopes; Probes; Transmission line measurements; Voltage measurement;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/TMTT.2002.807842

Filename

1179423