Abstract :
In silicon npn bipolar junction transistors grown on (100) oriented substrate, at base doping levels in excess of 1020 boron atoms/cm3, strain induced splitting of the normally sixfold degenerated conduction band minimum becomes important and needs to be considered in modeling of injection currents. The biaxial tensile strain, originating in the smaller covalent radius of boron compared to silicon, induces a lowering of two valleys with heavy effective mass in vertical direction whereas the remaining four valleys are raised in energy. Using a coupled set of equations for the electron gas systems in the twofold and fourfold degenerated valleys, emitter and collector current formulas are derived. In the relevant case of strong f-type intervalley scattering rates compared to Auger recombination rates (which holds at least up to about 1021 cm-3) collector currents are described by (VBC=0 V) jC=-e(Dn4n4,0+Dn2n2,0 )/w(eV(BE/V(th))-1) provided that the electron diffusion length is large compared to the base width w. Dn4 D n2, and n4,0, n2,0 are diffusion constants and equilibrium minority carrier concentrations in the two electron gas systems, respectively. In Si/SiGe heterojunction bipolar transistors the conduction band situation in the base is similar to that in extremely heavily boron doped (homojunction) base layers as presence of Ge also causes the conduction band minimum to split (splitting is, however, of opposite sign). Thus, the transport model discussed here applies also to that kind of device
Keywords :
degenerate semiconductors; doping profiles; electron gas; elemental semiconductors; microwave bipolar transistors; minority carriers; semiconductor device models; semiconductor doping; silicon; Si; base doping levels; biaxially strained base layers; collector currents; degenerated conduction band; electron gas systems; equilibrium minority carrier concentrations; injection currents; npn bipolar junction transistors; strain induced splitting; strong f-type intervalley scattering rates; transport model; Atomic measurements; Bipolar transistors; Boron; Capacitive sensors; Doping; Effective mass; Electrons; Semiconductor process modeling; Silicon; Tensile strain;