Focusing grating coupler in AlGaAs optical waveguide

Author

Suhara, T. ; Okada, K. ; Saso, T. ; Nishihara, H.

Author_Institution

Dept. of Electron., Osaka Univ., Japan

Volume

4

Issue

8

fYear

1992

Firstpage

903

Lastpage

905

Abstract

A focusing grating coupler (FGC) for focusing a guided wave into a spot in free space was fabricated in a III-V semiconductor waveguide for the first time. A FGC of 0.83-mm focal length and 0.5-mm*0.5-mm aperture for an AlGaAs waveguide and 0.83- mu m wavelength was designed and fabricated by electron-beam writing and reactive ion etching. Nearly diffraction-limited focus spot size of 2 mu m and a coupling efficiency of 20% were obtained.<>

Keywords

III-V semiconductors; aluminium compounds; diffraction gratings; focusing; gallium arsenide; integrated optics; optical couplers; optical waveguides; optical workshop techniques; 0.5 nm; 0.83 micron; 2 micron; 20 percent; AlGaAs optical waveguide; III-V semiconductor waveguide; IR; aperture; coupling efficiency; diffraction-limited focus spot size; electron-beam writing; focal length; focusing grating coupler; free space; grating coupler fabrication; guided wave; reactive ion etching; Etching; Gratings; Integrated optics; Optical buffering; Optical coupling; Optical device fabrication; Optical sensors; Optical waveguides; Semiconductor waveguides; Writing;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.149903

Filename

149903