Title :
Wide-bandwidth electromechanical actuators for tunneling displacement transducers
Author :
Kenny, T.W. ; Kaiser, W.J. ; Rockstad, H.K. ; Reynolds, J.K. ; Podosek, J.A. ; Vote, E.C.
Author_Institution :
Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
fDate :
9/1/1994 12:00:00 AM
Abstract :
A series of displacement transducers have been demonstrated which are based on the detection of electrons that quantum-mechanically tunnel across a narrow gap between electrodes. These transducers have important applications due to the sensitivity of the tunneling mechanism to sub-Å variations in the electrode gap. In this paper, we describe the recent development of wide-bandwidth electromechanical actuators and simple feedback circuitry which have been adapted for use in tunneling displacement transducers. With these actuators and circuits, we have built tunneling transducers with control bandwidths well in excess of 10 kHz. The design, fabrication, operation, and applications of these actuators are described
Keywords :
displacement measurement; electric actuators; micromechanical devices; tunnelling; control bandwidths; displacement transducers; electrode gap; micromechanical devices; quantum-mechanical tunnelling; wide-bandwidth electromechanical actuators; Actuators; Electrodes; Electrons; Laboratories; Microelectronics; Propulsion; Space technology; Transducers; Tunneling; Voting;
Journal_Title :
Microelectromechanical Systems, Journal of
