DocumentCode
114882
Title
A field-effect device based on an exfoliated thin film of few-layer graphene
Author
Kasjoo, Shahrir R. ; Ramli, Muhammad M. ; Zakaria, M.R. ; Arshad, M. K. Md ; Ayub, R. Mat ; Rahim, R.A. ; Hashim, U.
Author_Institution
Sch. of Microelectron. Eng., Univ. Malaysia Perlis (UniMAP), Arau, Malaysia
fYear
2014
fDate
27-29 Aug. 2014
Firstpage
370
Lastpage
372
Abstract
In this work, a back-gated field-effect device based on an exfoliated thin film of few-layer graphene (FLG) has been fabricated and some of its properties were characterized. The estimated hole mobility of the FLG film, extracted from the device transconductance, was approximately 843 cm2V-1s-1 which was lower than the typical reported values. The reasons for the lower mobility were briefly discussed in terms of charged impurity density, and contact resistance between FLG film and metal. The use of mechanical exfoliation method in producing thin films of FLG, which is cheap, fast and simple, can also be exploited in the development of other graphene-based devices.
Keywords
contact resistance; field effect devices; graphene; hole mobility; semiconductor thin films; FLG film; back-gated field-effect device; charged impurity density; contact resistance; device transconductance; estimated hole mobility; exfoliated thin film; few-layer graphene; graphene-based devices; mechanical exfoliation method; Films; Graphene; Impurities; Logic gates; Optical device fabrication; Silicon; Substrates; charged impurity density; contact resistance; field-effect device; graphene; mobility; transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics (ICSE), 2014 IEEE International Conference on
Conference_Location
Kuala Lumpur
Type
conf
DOI
10.1109/SMELEC.2014.6920874
Filename
6920874
Link To Document