Active-Matrix Microelectrode Arrays Integrated With Vertically Aligned Carbon Nanofibers

Author

Park, Jungwon ; Kwon, Seyeoul ; Jun, Seung Ik ; Mcknight, Timothy E. ; Melechko, Anatoli V. ; Simpson, Michael L. ; Dhindsa, Manjeet ; Heikenfeld, Jason ; Rack, Philip D.

Author_Institution

Dept. of Mater. Sci., Univ. of Tennessee, Knoxville, TN

Volume

30

Issue

3

fYear

2009

fDate

3/1/2009 12:00:00 AM

Firstpage

254

Lastpage

257

Abstract

In this letter, we have successfully integrated vertically aligned carbon nanofibers (VACNFs) onto active matrix thin-film transistor (TFT) and demonstrate a new microelectrode array (MEA) platform. The materials and processes of the bottom gate inverted staggered TFT structure were designed to be compatible with the requisite high-temperature (_~700degC) and direct current plasma-enhanced chemical vapor deposition VACNF growth process. The critical device integration issues are elaborated, and initial device characteristics are reported. This device platform provides great potential as an advanced MEA for direct cell sensing, probing, and recording with a high electrode density and active addressability.

Keywords

microelectrodes; nanofibres; thin film transistors; active addressability; active matrix microelectrode arrays; active matrix thin film transistor; cell sensing; device characteristics; device integration; device platform; direct current plasma-enhanced chemical vapor deposition; electrode density; vertically aligned carbon nanofibers; Active matrix addressing; microelectrode array (MEA); thin-film transistor (TFT); vertically aligned carbon nanofiber (VACNF);

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2008.2011927

Filename

4776504