Title :
Active-Matrix Microelectrode Arrays Integrated With Vertically Aligned Carbon Nanofibers
Author :
Park, Jungwon ; Kwon, Seyeoul ; Jun, Seung Ik ; Mcknight, Timothy E. ; Melechko, Anatoli V. ; Simpson, Michael L. ; Dhindsa, Manjeet ; Heikenfeld, Jason ; Rack, Philip D.
Author_Institution :
Dept. of Mater. Sci., Univ. of Tennessee, Knoxville, TN
fDate :
3/1/2009 12:00:00 AM
Abstract :
In this letter, we have successfully integrated vertically aligned carbon nanofibers (VACNFs) onto active matrix thin-film transistor (TFT) and demonstrate a new microelectrode array (MEA) platform. The materials and processes of the bottom gate inverted staggered TFT structure were designed to be compatible with the requisite high-temperature (~700degC) and direct current plasma-enhanced chemical vapor deposition VACNF growth process. The critical device integration issues are elaborated, and initial device characteristics are reported. This device platform provides great potential as an advanced MEA for direct cell sensing, probing, and recording with a high electrode density and active addressability.
Keywords :
microelectrodes; nanofibres; thin film transistors; active addressability; active matrix microelectrode arrays; active matrix thin film transistor; cell sensing; device characteristics; device integration; device platform; direct current plasma-enhanced chemical vapor deposition; electrode density; vertically aligned carbon nanofibers; Active matrix addressing; microelectrode array (MEA); thin-film transistor (TFT); vertically aligned carbon nanofiber (VACNF);
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2008.2011927
