DocumentCode
1150022
Title
Extended trench-gate power UMOSFET structure with ultralow specific on-resistance
Author
Venkatraman, Prasad ; Baliga, B. Jayant
Volume
28
Issue
9
fYear
1992
fDate
4/23/1992 12:00:00 AM
Firstpage
865
Lastpage
867
Abstract
An ultralow specific on-resistance power UMOSFET structure with the trench-gate extending down to the N+ substrate is presented. Specific on-resistances in the range 100-200 mu Omega cm2 have been experimentally demonstrated for devices capable of supporting up to 25 V. Comparison of theoretical and experimental results is provided.
Keywords
insulated gate field effect transistors; power transistors; 25 V; N + substrate; UMOSFET structure; experimental results; on-resistances; power MOSFET; trench gate extension; ultralow specific on-resistance;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19920546
Filename
135141
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