Title :
A summation-gated optical comparator for automated pattern inspection
Author :
Fehrs, D. ; Cuthbert, J.
Author_Institution :
Bell telephone laboratories, Inc., Allentown, PA., USA
fDate :
6/1/1973 12:00:00 AM
Keywords :
Adaptive optics; Automatic optical inspection; Instruments; Integrated optics; Laboratories; Optical design; Optical films; Optical surface waves; Photonic integrated circuits; Telephony;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1973.1077586
