Low-loss proton-exchanged waveguide in MgO-doped LiNbO/sub 3/ fabricated with pyrophosphoric acid using Ta/sub 2/O/sub 5/ protective mask

Author

Ohmori, Shigeru ; Yamamoto, Kazuhisa ; Taniuchi, Tetsuo

Author_Institution

Matsushita Electr. Ind. Co. Ltd., Osaka, Japan

Volume

3

Issue

12

fYear

1991

Firstpage

1099

Lastpage

1101

Abstract

The authors describe low-loss proton-exchanged channel waveguides in MgO-doped LiNbO/sub 3/. The authors demonstrate the application of a Ta/sub 2/O/sub 5/ film for the protective mask material in proton-exchanging instead of a Ta film in order to reduce the propagation loss. A Ta/sub 2/O/sub 5/ sputtered film was applied as a protective mask with pyrophosphoric acid. The propagation loss of the waveguide, measured with laser diode light ( lambda =0.83 mu m) was 0.5 dB/cm. It is shown that the use of a Ta/sub 2/O/sub 5/ mask reduces the propagation loss compared with the use of a Ta mask (1.5 dB/cm).<>

Keywords

integrated optics; ion exchange; lithium compounds; magnesium compounds; optical losses; optical waveguides; optical workshop techniques; protective coatings; tantalum compounds; 0.5 dB; 0.83 micron; LiNbO/sub 3/:MgO; Ta/sub 2/O/sub 5/; Ta/sub 2/O/sub 5/ sputtered film; laser diode light; low-loss proton-exchanged channel waveguides; propagation loss; protective mask; pyrophosphoric acid; Optical films; Optical harmonic generation; Optical scattering; Optical waveguides; Propagation losses; Protection; Protons; Refractive index; Temperature; Waveguide lasers;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.118014

Filename

118014