Title :
Low-loss proton-exchanged waveguide in MgO-doped LiNbO/sub 3/ fabricated with pyrophosphoric acid using Ta/sub 2/O/sub 5/ protective mask
Author :
Ohmori, Shigeru ; Yamamoto, Kazuhisa ; Taniuchi, Tetsuo
Author_Institution :
Matsushita Electr. Ind. Co. Ltd., Osaka, Japan
Abstract :
The authors describe low-loss proton-exchanged channel waveguides in MgO-doped LiNbO/sub 3/. The authors demonstrate the application of a Ta/sub 2/O/sub 5/ film for the protective mask material in proton-exchanging instead of a Ta film in order to reduce the propagation loss. A Ta/sub 2/O/sub 5/ sputtered film was applied as a protective mask with pyrophosphoric acid. The propagation loss of the waveguide, measured with laser diode light ( lambda =0.83 mu m) was 0.5 dB/cm. It is shown that the use of a Ta/sub 2/O/sub 5/ mask reduces the propagation loss compared with the use of a Ta mask (1.5 dB/cm).<>
Keywords :
integrated optics; ion exchange; lithium compounds; magnesium compounds; optical losses; optical waveguides; optical workshop techniques; protective coatings; tantalum compounds; 0.5 dB; 0.83 micron; LiNbO/sub 3/:MgO; Ta/sub 2/O/sub 5/; Ta/sub 2/O/sub 5/ sputtered film; laser diode light; low-loss proton-exchanged channel waveguides; propagation loss; protective mask; pyrophosphoric acid; Optical films; Optical harmonic generation; Optical scattering; Optical waveguides; Propagation losses; Protection; Protons; Refractive index; Temperature; Waveguide lasers;
Journal_Title :
Photonics Technology Letters, IEEE
