DocumentCode
1152447
Title
Two-dimensional monomode fibre array manufacture using UV-LIGA process
Author
Weiland, D. ; Lützelschwab, M. ; Desmulliez, M.P.Y.
Author_Institution
Microsystems Eng. Centre, Heriot-Watt Univ., Edinburgh, UK
Volume
41
Issue
17
fYear
2005
Firstpage
978
Lastpage
979
Abstract
A method to manufacture two-dimensional bundles of singlemode optical fibres is described. Submicron translational alignment accuracy is demonstrated by combining electrostatic movement and optical monitoring of the actual fibre position in a closed loop feedback alignment system.
Keywords
LIGA; optical arrays; optical fabrication; optical fibres; ultraviolet lithography; 2D monomode fibre array manufacture; UV-LIGA process; closed loop feedback alignment system; electrostatic movement; fibre position; optical monitoring; singlemode optical fibres; submicron translational alignment accuracy;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20051894
Filename
1500295
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