• DocumentCode
    1152798
  • Title

    On the Purity of Atmospheric Glow-Discharge Plasma

  • Author

    Anand, Venu ; Gowravaram, Mohan Rao

  • Author_Institution
    Dept. of Instrum., Indian Inst. of Sci., Bangalore, India
  • Volume
    37
  • Issue
    9
  • fYear
    2009
  • Firstpage
    1811
  • Lastpage
    1816
  • Abstract
    Purity of the glow-discharge plasma at atmospheric pressure for surface modification applications is always debatable, since it works at ambient atmosphere. We have demonstrated on the use of optical emission spectroscopy to test the purity of this kind of plasma. The effect of gas flow pattern, nature of gas, and its flow rate on the plasma chemistry was studied. The importance of proper system design in maintaining a uniform flow of heavy and inert gases as carrier gas in atmospheric glow-discharge plasma was confirmed. The surface of a plasma-treated PET sample was analyzed using X-ray photoelectron spectroscopy to verify the studies on plasma purity done using emission spectrum.
  • Keywords
    X-ray photoelectron spectra; glow discharges; luminescence; plasma diagnostics; plasma electromagnetic wave propagation; surface reconstruction; X-ray photoelectron spectroscopy to; atmospheric glow-discharge plasma; emission spectrum; optical emission spectroscopy; plasma purity; surface modification applications; Atmospheric glow discharge; X-ray photoelectron spectroscope; dielectric barrier; optical emission spectroscopy;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2009.2025949
  • Filename
    5175412