Title :
On the Purity of Atmospheric Glow-Discharge Plasma
Author :
Anand, Venu ; Gowravaram, Mohan Rao
Author_Institution :
Dept. of Instrum., Indian Inst. of Sci., Bangalore, India
Abstract :
Purity of the glow-discharge plasma at atmospheric pressure for surface modification applications is always debatable, since it works at ambient atmosphere. We have demonstrated on the use of optical emission spectroscopy to test the purity of this kind of plasma. The effect of gas flow pattern, nature of gas, and its flow rate on the plasma chemistry was studied. The importance of proper system design in maintaining a uniform flow of heavy and inert gases as carrier gas in atmospheric glow-discharge plasma was confirmed. The surface of a plasma-treated PET sample was analyzed using X-ray photoelectron spectroscopy to verify the studies on plasma purity done using emission spectrum.
Keywords :
X-ray photoelectron spectra; glow discharges; luminescence; plasma diagnostics; plasma electromagnetic wave propagation; surface reconstruction; X-ray photoelectron spectroscopy to; atmospheric glow-discharge plasma; emission spectrum; optical emission spectroscopy; plasma purity; surface modification applications; Atmospheric glow discharge; X-ray photoelectron spectroscope; dielectric barrier; optical emission spectroscopy;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2009.2025949