DocumentCode
1153047
Title
A review of hydrodynamic and energy-transport models for semiconductor device simulation
Author
Grasser, Tibor ; Tang, Ting-wei ; Kosina, Hans ; Selberherr, Siegfried
Author_Institution
Inst. for Microelectron., Tech. Univ. Vienna, Austria
Volume
91
Issue
2
fYear
2003
fDate
2/1/2003 12:00:00 AM
Firstpage
251
Lastpage
274
Abstract
Since Stratton published his famous paper four decades ago, various transport models have been proposed which account for the average carrier energy or temperature in one way or another. The need for such transport models arose because the traditionally used drift-diffusion model cannot capture nonlocal effects which gained increasing importance in modern miniaturized semiconductor devices. In the derivation of these models from Boltzmann´s transport equation, several assumptions have to be made in order to obtain a tractable equation set. Although these assumptions may differ significantly, the resulting final models show various similarities, which has frequently led to confusion. We give a detailed review on this subject, highlighting the differences and similarities between the models, and we shed some light on the critical issues associated with higher order transport models.
Keywords
Boltzmann equation; semiconductor device models; Boltzmann transport equation; drift-diffusion model; energy transport model; hydrodynamic model; nonlocal effects; semiconductor device simulation; Analytical models; Closed-form solution; Doping profiles; Equations; Geometry; Hydrodynamics; Semiconductor device modeling; Semiconductor devices; Semiconductor process modeling; Temperature;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/JPROC.2002.808150
Filename
1182061
Link To Document