• DocumentCode
    1153047
  • Title

    A review of hydrodynamic and energy-transport models for semiconductor device simulation

  • Author

    Grasser, Tibor ; Tang, Ting-wei ; Kosina, Hans ; Selberherr, Siegfried

  • Author_Institution
    Inst. for Microelectron., Tech. Univ. Vienna, Austria
  • Volume
    91
  • Issue
    2
  • fYear
    2003
  • fDate
    2/1/2003 12:00:00 AM
  • Firstpage
    251
  • Lastpage
    274
  • Abstract
    Since Stratton published his famous paper four decades ago, various transport models have been proposed which account for the average carrier energy or temperature in one way or another. The need for such transport models arose because the traditionally used drift-diffusion model cannot capture nonlocal effects which gained increasing importance in modern miniaturized semiconductor devices. In the derivation of these models from Boltzmann´s transport equation, several assumptions have to be made in order to obtain a tractable equation set. Although these assumptions may differ significantly, the resulting final models show various similarities, which has frequently led to confusion. We give a detailed review on this subject, highlighting the differences and similarities between the models, and we shed some light on the critical issues associated with higher order transport models.
  • Keywords
    Boltzmann equation; semiconductor device models; Boltzmann transport equation; drift-diffusion model; energy transport model; hydrodynamic model; nonlocal effects; semiconductor device simulation; Analytical models; Closed-form solution; Doping profiles; Equations; Geometry; Hydrodynamics; Semiconductor device modeling; Semiconductor devices; Semiconductor process modeling; Temperature;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/JPROC.2002.808150
  • Filename
    1182061