Title :
Measurement of longitudinal piezoelectric coefficient of thin films by a laser-scanning vibrometer
Author :
Yao, Kui ; Tay, Francis Eng Hock
Author_Institution :
Inst. of Mater. Res. & Eng., Singapore, Singapore
Abstract :
A laser scanning vibrometer (LSV) was used for the first time to measure the piezoelectric coefficient of ferroelectric thin films based on the converse piezoelectric effect. The significant advantages of the use of the LSV or this purpose were demonstrated. Several key points were discussed in order to achieve reliable and accurate results.
Keywords :
ferroelectric thin films; lead compounds; measurement by laser beam; piezoelectric thin films; piezoelectricity; vibration measurement; PZT; PZT thin films; PbZrO3TiO3; converse piezoelectric effect; ferroelectric thin films; laser scanning vibrometer; longitudinal piezoelectric coefficient measurement; piezoelectric properties; Ferroelectric materials; Optical films; Piezoelectric effect; Piezoelectric films; Sputtering; Stress; Substrates; Time measurement; Vibrometers; Acoustics; Coated Materials, Biocompatible; Crystallography; Equipment Design; Interferometry; Lasers; Lead; Materials Testing; Sensitivity and Specificity; Titanium; Transducers; Vibration; Zirconium;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2003.1182115
