DocumentCode :
1153687
Title :
Spectral-approximation-based intelligent modeling for distributed thermal processes
Author :
Deng, Hua ; Li, Han-Xiong ; Chen, Guanrong
Author_Institution :
Sch. of Mech. & Electr. Eng., Central South Univ., Changsha, China
Volume :
13
Issue :
5
fYear :
2005
Firstpage :
686
Lastpage :
700
Abstract :
A spectral-approximation-based intelligent modeling approach is proposed for the distributed thermal processing of the snap curing oven that is used in semiconductor packaging industry. The snap curing oven can be described by a nonlinear parabolic distributed parameter system (DPS) in the time-space domain. After finding a proper approximation of the complex boundary conditions of the system, the spectral methods can be applied to time-space separation and model reduction, and neural networks (NNs) can be used for state estimation and system identification. With the help of model reduction techniques, the dynamics of the curing process derived from physical laws can be described by a model of low-order nonlinear ordinary differential equations with a few uncertain parameters and unknown nonlinearities. A neural observer can then be designed to estimate the states of the ordinary differential equation model from measurements taken at specified locations in the field. Using the estimated states, a hybrid general regression NN is trained to be a nonlinear model of the curing process in state-space formulation, which is suitable for the further application of traditional control techniques. Real-time experiments on the snap curing oven show that the proposed modeling method is effective. This modeling methodology can be applied to a class of nonlinear DPSs in industrial thermal processing.
Keywords :
curing; distributed parameter systems; integrated circuit manufacture; integrated circuit packaging; neural nets; nonlinear differential equations; observers; regression analysis; state-space methods; thermal management (packaging); complex boundary condition; curing process; distributed thermal process; hybrid general regression; industrial thermal processing; low-order nonlinear ordinary differential equations; model reduction techniques; neural networks; neural observer; nonlinear parabolic distributed parameter system; semiconductor packaging industry; snap curing oven; spectral-approximation based intelligent modeling; state estimation; system identification; time-space domain; time-space separation; Boundary conditions; Curing; Differential equations; Distributed parameter systems; Neural networks; Ovens; Reduced order systems; Semiconductor device packaging; State estimation; System identification; Curing process; distributed thermal process; neural networks (NNs); nonlinear distributed parameter systems (DPSs); spatial system identification; spectral methods; state estimation;
fLanguage :
English
Journal_Title :
Control Systems Technology, IEEE Transactions on
Publisher :
ieee
ISSN :
1063-6536
Type :
jour
DOI :
10.1109/TCST.2005.847329
Filename :
1501852
Link To Document :
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