Title :
A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution
Author :
Beyeler, Felix ; Muntwyler, Simon ; Nelson, Bradley J.
Author_Institution :
Inst. of Robot. & Intell. Syst., ETH Zurich, Zurich
fDate :
4/1/2009 12:00:00 AM
Abstract :
This paper describes the design of a six-axis microelectromechanical systems (MEMS) force-torque sensor. A movable body is suspended by flexures that allow deflections and rotations along the x-, y-, and z-axes. The orientation of this movable body is sensed by seven capacitors. Transverse sensing is used for all capacitors, resulting in a high sensitivity. A batch fabrication process is described as capable of fabricating these multiaxis sensors with a high yield. The force sensor is experimentally investigated, and a multiaxis calibration method is described. Measurements show that the resolution is on the order of a micro-Newton and nano-Newtonmeter. This is the first six-axis MEMS force sensor that has been successfully developed.
Keywords :
force sensors; micromechanical devices; torquemeters; MEMS force-torque sensor; batch fabrication process; capacitors; micro-Newton resolution; microelectromechanical systems; movable body; multiaxis calibration; multiaxis sensors; nano-Newtonmeter resolution; six-axis MEMS force sensor; transverse sensing; Calibration; force measurement; microelectromechanical devices; microsensors; torque measurement;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2009.2013387