DocumentCode
1154193
Title
INFOS 2005 – Insulating Films on Semiconductors
Volume
17
Issue
4
fYear
2004
Firstpage
642
Lastpage
642
Abstract
Provides notice of upcoming conference events of interest to practitioners and researchers.
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2004.839676
Filename
1353322
Link To Document