A collimation mirror in polymeric planar waveguide formed by reactive ion etching

Author

Kim, Jin-Ha ; Chen, Ray T.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Texas, Austin, TX, USA

Volume

15

Issue

3

fYear

2003

fDate

3/1/2003 12:00:00 AM

Firstpage

422

Lastpage

424

Abstract

We fabricated and characterized an integrated optical mirror in a polymeric waveguide. A parabola-shaped cavity is etched in fluorinated polyimide using oxygen reactive ion etching. The vertically etched sidewall of the planar waveguide works as a highly reflecting total-internal-reflection mirror, which collimates a diverging beam from its focus. The estimated mirror insertion loss of the demonstrated device is 2.4 dB or less.

Keywords

integrated optics; optical collimators; optical fabrication; optical focusing; optical losses; optical planar waveguides; optical polymers; optical resonators; reflectivity; 2.4 dB; collimation mirror; diverging beam collimation; fluorinated polyimide; highly reflecting; integrated optical mirror; mirror insertion loss; oxygen reactive ion etching; parabola-shaped cavity; polymeric planar waveguide; polymeric waveguide; reactive ion etching; vertically etched sidewall; Etching; Integrated optics; Mirrors; Optical collimators; Optical planar waveguides; Optical polymers; Optical waveguides; Particle beam optics; Planar waveguides; Polyimides;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2003.808757

Filename

1182778