Title :
Measurement of VLSI power supply current by electron-beam probing
Author :
Jenkins, Keith A. ; Franch, Robert L.
Author_Institution :
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
fDate :
6/1/1992 12:00:00 AM
Abstract :
The measurement of power supply noise and current by electron-beam probing is described. Noise measurements can be made on the chip under test, and current measurements can be made on the circuit board. It is noted that power supply voltages are obtained simultaneously. This measurement method is particularly useful when combined with a larger program of circuit characterization, or design verification, by electron-beam probing
Keywords :
VLSI; electric current measurement; electric noise measurement; electron beam applications; integrated circuit testing; power supply circuits; VLSI; current measurements; electron-beam probing; measurement method; power supply current; power supply noise; Circuit noise; Circuit testing; Current measurement; Current supplies; Noise measurement; Power measurement; Power supplies; Printed circuits; Semiconductor device measurement; Very large scale integration;
Journal_Title :
Solid-State Circuits, IEEE Journal of
