Title :
Ultralow biased widely continuously tunable fabry-Perot filter
Author :
Irmer, Sören ; Daleiden, Jürgen ; Rangelov, Ventzeslav ; Prott, Cornelia ; Römer, Friedhard ; Strassner, Martin ; Tarraf, Amer ; Hillmer, Hartmut
Author_Institution :
Center for Interdisciplinary Nanostructure Sci. & Technol., Univ. of Kassel, Germany
fDate :
3/1/2003 12:00:00 AM
Abstract :
Optical filters capable of single control parameter-based wide tuning are implemented and studied. The surface micromachined Fabry-Perot filter consists of two InP-air-gap distributed Bragg reflectors and shows a wavelength tuning of more than 140 nm using only a single voltage of up to 3.2 V at currents below 0.2 mA. The membrane-based filter is designed to block all wavelengths in the whole range of 1250-1800 nm apart from its transmission wavelength.
Keywords :
Fabry-Perot resonators; III-V semiconductors; distributed Bragg reflectors; electro-optical filters; indium compounds; interference filters; micro-optics; micromachining; optical tuning; 0.2 mA; 1250 to 1800 nm; 3.2 V; GaAs-InP; GaAs-InP multiple-layer structure; InGaAs; InP; MOEMS; membrane-based filter; micro-opto electromechanical system; optical filters; single control parameter-based wide tuning; single voltage; surface micromachined Fabry-Perot filter; transmission wavelength; two InP-air-gap distributed Bragg reflectors; ultralow biased widely continuously tunable Fabry-Perot filter; wavelength tuning; Biomembranes; Distributed Bragg reflectors; Epitaxial growth; Fabry-Perot; Indium phosphide; Laser tuning; Mirrors; Optical filters; Optical tuning; Tunable circuits and devices;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2002.807908