Title :
Effects of boundary conditions in the dynamic model of the RF sheath
Author :
Sternberg, Natalia ; Godyak, Valery A.
Author_Institution :
Dept. of Math. & Comput. Sci., Clark Univ., Worcester, MA, USA
fDate :
9/1/1994 12:00:00 AM
Abstract :
The present paper is concerned with the effects of boundary conditions on the electrical sheath characteristics in the dynamic rf sheath model. The dynamic rf sheath model, which is described by a moving boundary problem, is solved analytically and numerically in the collisionless case for arbitrary values of the electric field at the plasma-sheath interface. The results that are obtained show that even for relatively high rf sheath voltages, the rf sheath capacitance and the dc sheath voltage are influenced in a significant way by the choice of the boundary condition for the electric field
Keywords :
plasma sheaths; plasma theory; DC sheath voltage; RF sheath; RF sheath capacitance; boundary conditions; collisionless plasma; dynamic model; electric field; electrical sheath; moving boundary problem; plasma-sheath interface; Boundary conditions; Plasma chemistry; Plasma density; Plasma materials processing; Plasma properties; Plasma sheaths; Plasma sources; Plasma temperature; Radio frequency; Voltage;
Journal_Title :
Magnetics, IEEE Transactions on
