A 0.3-mW/Ch 1.25 V Piezo-Resistance Digital ROIC for Liquid-Dispensing MEMS

Author

Durà, Roger ; Mathieu, Fabrice ; Nicu, Liviu ; Pérez-Murano, Francesc ; Serra-Graells, Francisco

Author_Institution

IMB-CNM, Inst. de Microelectron. de Barcelona, Barcelona, Spain

Volume

56

Issue

5

fYear

2009

fDate

5/1/2009 12:00:00 AM

Firstpage

957

Lastpage

965

Abstract

A low-power multichannel CMOS digital read-out IC (ROIC) for differential piezo-resistive sensing is presented as part of the positioning system of a liquid dispensing MEMS. New very low-voltage and single-battery compatible CMOS circuits are proposed for digital gain tuning, pre-amplification, and integrating A/D conversion. Overall low-power consumption is achieved by operating the key devices in subthreshold in order to prevent from heating the fluidic MEMS. A complete quad-channel ROIC has been integrated in 0.35- ??m CMOS 2-polySi 4-metal technology. The reported experimental results agree with the electrical simulations.

Keywords

CMOS digital integrated circuits; analogue-digital conversion; low-power electronics; microfluidics; microsensors; piezoresistive devices; readout electronics; 2-polySi 4-metal technology; digital gain tuning; fluidic MEMS; integrated A/D conversion; liquid dispensing MEMS positioning system; low-power multichannel CMOS digital read-out IC; piezo-resistance digital ROIC; piezo-resistive sensor; preamplification; quad-channel ROIC; single-battery compatible CMOS circuit; size 0.35 mum; voltage 1.25 V; Analog-to-digital (A/D) conversion; CMOS interface circuits; micro-electro-mechanical systems (MEMS); piezo- resistive sensors; pulse density modulation (PDM);

fLanguage

English

Journal_Title

Circuits and Systems I: Regular Papers, IEEE Transactions on

Publisher

ieee

ISSN

1549-8328

Type

jour

DOI

10.1109/TCSI.2009.2015210

Filename

4783040