Title :
Fast Laser Scanning Imaging System for Surface Displacement Measurements
Author :
Grauby, Stéphane ; Salhi, Amine ; Rampnoux, Jean-Michel ; Claeys, Wilfrid ; Dilhaire, Stefan
Author_Institution :
Centre de Phys. Moleculaire Opt. et Hertzienne, Univ. Bordeaux 1, Talence
fDate :
3/1/2009 12:00:00 AM
Abstract :
We present a scanning imaging system using galvanometric mirrors coupled to a heterodyne interferometric probe. This setup is dedicated to the off-plane surface displacement imaging, in particular for microelectronic devices. The use of galvanometric mirrors coupled to the heterodyne probe makes it a sensitive and fast measurement system. We present results on a microelectronic device, and we compare the performances of this system with point and CCD interferometry imaging setups.
Keywords :
CCD image sensors; displacement measurement; galvanometers; light interferometry; mirrors; optical scanners; CCD interferometry imaging; fast laser scanning imaging system; galvanometric mirrors; heterodyne interferometric probe; microelectronic devices; surface displacement measurements; Displacement measurement; electronics; imaging; interferometry;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2008.2012177
