DocumentCode
1165298
Title
Modeling of Micropitch Shift of a Magnetoelectrical Sensor During Laser Solder Ball Bonding Process
Author
Tian, Dewen ; Wang, Chunqing ; Tian, Yanhong
Author_Institution
Harbin Inst. of Technol., Harbin
Volume
32
Issue
1
fYear
2009
Firstpage
136
Lastpage
145
Abstract
With the development of optoelectronics and microelectromechanical systems (MEMS) packaging, laser soldering has become an extensively used interconnection technique in electronic manufacturing industry. Postsolder shift in assembling of such components is the most challenging issue to affect the packaging yields. To maintain a high coupling efficiency or accuracy, tight control of postsolder shift is required. In the present work, a 3-D thermal-mechanical coupled finite element model was developed to investigate the time-dependent pitch shift induced by the laser solder ball bonding process. This model accounted for the laser interaction, the heat conduction, the thermal induced deformation and the phase change of the solder and could reflect the actual laser soldering process. The modeling results show different deformation mechanisms in the prebumping and reflow processes. The pitch shift is mainly induced by the thermal shrinkage of solder. The pitch angles obtained from the finite element analysis are in good agreement with those from the measurement using laser goniometer.
Keywords
bonding processes; deformation; finite element analysis; laser beam applications; microsensors; soldering; 3-D thermal-mechanical coupled finite element model; actual laser soldering process; finite element analysis; heat conduction; interconnection technique; laser solder ball bonding process; laser soldering; magnetoelectrical sensor; microelectromechanical system packaging; micropitch shift; thermal induced deformation; thermal shrinkage; Bonding processes; Deformable models; Electronic packaging thermal management; Finite element methods; Laser modes; Laser transitions; Magnetic sensors; Microelectromechanical systems; Semiconductor device modeling; Soldering; Finite element; laser solder ball bonding; modeling; postsolder shift;
fLanguage
English
Journal_Title
Advanced Packaging, IEEE Transactions on
Publisher
ieee
ISSN
1521-3323
Type
jour
DOI
10.1109/TADVP.2008.2008634
Filename
4785304
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