• DocumentCode
    1165917
  • Title

    Optical piezoelectric transducer for nano-ultrasonics

  • Author

    Lin, Kung-Hsuan ; Chern, Gia-Wei ; Yu, Cheng-Ta ; Liu, Tzu-Ming ; Pan, Chang-Chi ; Chen, Guan-Ting ; Chyi, Jen-Inn ; Huang, Sheng-Wen ; Li, Pai-Chi ; Sun, Chi-Kuang

  • Author_Institution
    Graduate Inst. of Electro-Opt. Eng., Nat. Taiwan Univ., Taipei, Taiwan
  • Volume
    52
  • Issue
    8
  • fYear
    2005
  • Firstpage
    1404
  • Lastpage
    1414
  • Abstract
    Piezoelectric semiconductor strained layers can be treated as piezoelectric transducers to generate nanometer-wavelength and THz-frequency acoustic waves. The mechanism of nano-acoustic wave (NAW) generation in strained piezoelectric layers, induced by femtosecond optical pulses, can be modeled by a macroscopic elastic continuum theory. The optical absorption change of the strained layers modulated by NAW through quantum-confined Franz-Keldysh (QCFK) effects allows optical detection of the propagating NAW. Based on these piezoelectric-based optical principles, we have designed an optical piezoelectric transducer (OPT) to generate NAW. The optically generated NAW is then applied to one-dimensional (1-D) ultrasonic scan for thickness measurement, which is the first step toward multidimensional nano-ultrasonic imaging. By launching a NAW pulse and resolving the returned acoustic echo signal with femtosecond optical pulses, the thickness of the studied layer can be measured with <1 nm resolution. This nano-structured OPT technique will provide the key toward the realization of nano-ultrasonics, which is analogous to the typical ultrasonic techniques but in a nanometer scale.
  • Keywords
    acoustic wave production; echo; high-speed optical techniques; micro-optics; nanotechnology; piezoelectric transducers; semiconductor devices; submillimetre wave generation; ultrasonic devices; THz-frequency acoustic waves; acoustic echo signal; femtosecond optical pulses; macroscopic elastic continuum theory; multidimensional imaging; nanoacoustic wave generation; nanometer-wavelength acoustic waves; nanoultrasonic imaging; nanoultrasonics; one-dimensional ultrasonic scan; optical absorption; optical detection; optical transducers; piezoelectric semiconductor; piezoelectric transducer; quantum-confined Franz-Keldysh effects; semiconductor strained layers; strained piezoelectric layers; thickness measurement; Acoustic pulses; Optical modulation; Optical pulses; Optimized production technology; Piezoelectric transducers; Pulse measurements; Signal resolution; Thickness measurement; Ultrafast optics; Ultrasonic imaging; Electrochemistry; Equipment Design; Equipment Failure Analysis; Nanotechnology; Optics; Semiconductors; Transducers; Ultrasonics;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/TUFFC.2005.1509800
  • Filename
    1509800