Characterisation and modelling of coplanar transmission lines on SiC substrates

Author

Royet, A.S. ; Cabon, B. ; Rozeau, O. ; Ouisse, T. ; Billon, T.

Author_Institution

IMEP, France

Volume

149

Issue

56

fYear

2002

Firstpage

253

Lastpage

256

Abstract

The paper investigates the characteristics of microwave transmission in coplanar waveguides (CPWs) fabricated on various silicon carbide substrates. Propagation constant and characteristic impedance measurements were performed at frequencies from 0.1 to 10 GHz. Different propagation modes are observed as a function of frequency and substrate resistivity. In the case of the low-loss structure, a quasi-TEM equivalent circuit model was developed from the available process parameters, taking into account the effects of electromagnetic fields in CPW structures.

Keywords

coplanar transmission lines; coplanar waveguides; electric impedance measurement; electromagnetic fields; equivalent circuits; microwave measurement; silicon compounds; waveguide theory; 0.1 to 10 GHz; CPW structures; SiC; characteristic impedance measurement; coplanar transmission lines; coplanar waveguides; electromagnetic fields; low-loss structure; microwave measurement setup; microwave transmission; process parameters; propagation constant measurement; quasi-TEM equivalent circuit model; silicon carbide substrates; substrate resistivity;

fLanguage

English

Journal_Title

Microwaves, Antennas and Propagation, IEE Proceedings

Publisher

iet

ISSN

1350-2417

Type

jour

DOI

10.1049/ip-map:20020564

Filename

1189592