A new optical nanoinclusions detection method in transparent media

The influence of nanoninclusions on realization precisions and sensitivities of a recently developed new approach in anisotropic (single-axis) crystals investigation is considered. It is proved in the work that one of the important experimental realization conditions of the developed approach is when ellipsometric reflection systems parameters are Ψ = π/4 H Δ = π/2. It is proposed to choose Si-SiO₂ -type structures (silicon dioxide or silicon nitride film on silicon surface), which are isotropic and homogeneous, as a reflection system. It is shown that the precision and sensitivity of this approach considerably depends on the presence of nanoinclusions in the media under study.