Title :
128x128-element IrSi Schottky-barrier focal plane arrays for long-wavelength infrared imaging
Author :
Tsaur, Bor-Yeu ; Mcnutt, Michael J. ; Bredthauer, Richard A. ; Mattson, R.B.
Author_Institution :
MIT Lincoln Lab., Lexington, MA, USA
Abstract :
The fabrication and initial laboratory test of 128x128-element focal plane arrays integrating IrSi detectors with a cutoff wavelength of approximately 9.4 μm and surface-channel CCD readout circuitry are presented. This extends thermal imaging with silicide Schottky-barrier detector arrays into the long-wavelength infrared (LWIR) spectral band (8 to 14 μm) for the first time. High-quality imagery with a minimum resolvable temperature of approximately 0.3 K is obtained.
Keywords :
CCD image sensors; Schottky-barrier diodes; indium compounds; infrared detectors; infrared imaging; 0.3 K; 128 pixel; 16384 pixel; 8 to 14 micron; IrSi; Schottky-barrier focal plane arrays; cutoff wavelength; laboratory test; long-wavelength infrared imaging; minimum resolvable temperature; surface-channel CCD readout circuitry; thermal imaging; Charge coupled devices; Circuit testing; Fabrication; Infrared detectors; Infrared imaging; Laboratories; Optical imaging; Sensor arrays; Silicides; Surface waves;
Journal_Title :
Electron Device Letters, IEEE
