DocumentCode
1166907
Title
All-around photolithography
Author
Gnewuch, H. ; Salvi, J. ; Pannell, C.N.
Author_Institution
Sch. of Phys. Sci., Kent Univ., Canterbury, UK
Volume
39
Issue
5
fYear
2003
fDate
3/6/2003 12:00:00 AM
Firstpage
422
Lastpage
424
Abstract
A versatile and simple technique for the unrestricted photolithographic patterning of the curved lateral surface of an optical fibre is described, offering a minimal feature size of ∼20 μm.
Keywords
optical fibre fabrication; photolithography; all-around photolithography; fabrication method; optical fibre;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20030326
Filename
1189989
Link To Document