Low-loss ZnO optical waveguides for SAW-AO applications

Author

Wu, Mu Shiang ; Azuma, Atsushi ; Shiosaki, Tadashi ; Kawabata, Akira

Author_Institution

Fac. of Eng., Kyoto Univ., Japan

Volume

36

Issue

4

fYear

1989

fDate

7/1/1989 12:00:00 AM

Firstpage

442

Lastpage

445

Abstract

Acoustooptic Bragg deflectors (ABDs) with high diffraction efficiencies were fabricated using ZnO thin films deposited on sapphire, glass, and Si substrates by an RF magnetron sputtering system. Optical waveguide losses of the ZnO films were about 0.5 dBcm/sup -1/. Diffraction efficiencies of 95 and 98% for the TE/sub 0/ mode beam (at 632.8 nm) were accomplished by acoustic powers of 90 mW in a ZnO film on glass and 80 mW in a ZnO film on Si, respectively. The diffraction efficiencies of the ABD using a ZnO film on sapphire with interdigital transducers of different Q values and with the surface-acoustic-wave propagating along and perpendicular to the c-axis of the ZnO film were also determined.<>

Keywords

acousto-optical devices; integrated optics; optical deflectors; optical losses; optical waveguides; surface acoustic wave devices; zinc compounds; 632.8 nm; 80 mW; 90 mW; 95 percent; 98 percent; Al/sub 2/O/sub 3/; RF magnetron sputtering; SAW propagation; Si substrates; TE/sub 0/ mode beam; ZnO optical waveguides; acoustic powers; acousto-optical Bragg deflectors; diffraction efficiencies; glass; high diffraction efficiencies; interdigital transducers; optical waveguide losses; sapphire; Acoustic diffraction; Glass; Optical diffraction; Optical films; Optical waveguides; Semiconductor films; Semiconductor thin films; Sputtering; Substrates; Zinc oxide;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.31781

Filename

31781