Predictive Hot-Carrier Modeling of n-Channel MOSFETs

We present a physics-based hot-carrier degradation (HCD) model and validate it against measurement data on SiON n-channel MOSFETs of various channel lengths, from ultrascaled to long-channel transistors. The HCD model is capable of representing HCD in all these transistors stressed under different conditions using a unique set of model parameters. The degradation is modeled as a dissociation of Si-H bonds induced by two competing processes. It can be triggered by solitary highly energetical charge carriers or by excitation of multiple vibrational modes of the bond. In addition, we show that the influence of electron-electron scattering (EES), the dipole-field interaction, and the dispersion of the Si-H bond energy are crucial for understanding and modeling HCD. All model ingredients are considered on the basis of a deterministic Boltzmann transport equation solver, which serves as the transport kernel of a physics-based HCD model. Using this model, we analyze the role of each ingredient and show that EES may only be neglected in long-channel transistors, but is essential in ultrascaled devices.