Broadband Space Conservative On-Wafer Network Analyzer Calibrations With More Complex Load and Thru Models

Author

Padmanabhan, Sathya ; Dunleavy, Lawrence ; Daniel, John E. ; Rodríguez, Alberto ; Kirby, Peter L.

Author_Institution

Dept. of Electr. Eng., Univ. of South Florida, Tampa, FL

Volume

54

Issue

9

fYear

2006

Firstpage

3583

Lastpage

3593

Abstract

An improved vector network analyzer (VNA) calibration approach is demonstrated that utilizes planar lumped short-open-load-thru standards and achieves accuracy comparable to thru-reflect-line (TRL) at high frequency, without the commonly occurring errors in TRL at low frequency. The approach relies on complex load and thru models for coplanar waveguide and microstrip standards that are not currently available in typical VNA firmware. It is shown that the RF performance changes due to variations in fabrication of load can be addressed by "calibrating" or adjusting the load model with the measured dc resistance for a particular load. Good results are shown for a wide range of substrates (GaAs, alumina, and FR-4) and frequencies to 110 GHz

Keywords

S-parameters; calibration; coplanar waveguides; millimetre wave measurement; network analysers; 110 GHz; coplanar waveguide; millimeter-wave measurements; scattering parameters; thru-reflect-line; vector network analyzer calibration; wafer network analyzer calibration; Calibration; Coplanar waveguides; Electrical resistance measurement; Fabrication; Gallium arsenide; Load modeling; Microprogramming; Microstrip; Particle measurements; Radio frequency; Calibration; error correction; millimeter-wave measurements; scattering parameters; standards;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/TMTT.2006.881027

Filename

1684155