Title :
Fabrication of microcuvettes using anodic aluminum oxide membrane
Author :
Tzaneva, Boriana R. ; Videkov, Valentin H.
Author_Institution :
Tech. Univ. of Sofia, Sofia, Bulgaria
Abstract :
A variant for preparing an anodic aluminium oxide (AAO) membrane in copper ring with deposited tin last layer is proposed in the work. It allows to create closed microholders (microcuvettes) with developed nanostructured surface by soldering. Classical techniques as photolithography, electrochemical oxidation and metal deposition, etching and soldering was used. Is it approved by FTIR-analysis, that the prepared by proposed technological scheme cuvettes can be used as closed volumes containing gas and volatile liquids with designation of optical sensors.
Keywords :
Fourier transform infrared spectroscopy; aluminium compounds; copper; etching; membranes; micromechanical devices; oxidation; photolithography; AAO membrane; FTIR-analysis; anodic aluminum oxide membrane; closed microholders; copper ring; deposited tin last layer; electrochemical oxidation; etching; metal deposition; microcuvettes fabrication; optical sensors; photolithography; soldering; volatile liquids; Aluminum oxide; Copper; Soldering; Surface morphology; Surface treatment; Tin; Anodic aluminum oxide; FTIR; cuvette; sensors;
Conference_Titel :
Actual Problems of Electronics Instrument Engineering (APEIE), 2014 12th International Conference on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4799-6019-4
DOI :
10.1109/APEIE.2014.7040828