DocumentCode
1170264
Title
Unipolar arc behavior in high-frequency fields
Author
Levchenko, Igor ; Voloshko, A. ; Keidar, Michael ; Beilis, Isak I.
Author_Institution
Kharkov Nat. Aerosp. Univ., Ukraine
Volume
31
Issue
1
fYear
2003
fDate
2/1/2003 12:00:00 AM
Firstpage
137
Lastpage
141
Abstract
In the present paper, we describe experimental investigations of unipolar arcs generated in a vacuum arc plasma. An effect of additional injection of the high-frequency power is studied. A coaxial floating arc probe of special design is used for the arc characteristic measurements, and the arc tracks on the polished probe electrodes are studied. The breakdown rate of the probe in the high-frequency plasma discharge is found to have an abrupt cutoff with a frequency approaching the critical value of about 107 Hz. Independent measurement of electrode erosion confirms this effect. The eroded mass reaches the value of 10-12 kg·s-1 for zero frequency and falls to the value of 10-13 kg·s-1 for frequency approaching 107 Hz.
Keywords
plasma probes; plasma sheaths; vacuum arcs; 10000000 Hz; arc characteristic measurements; arc tracks; breakdown rate; cathode spot initiation; coaxial floating arc probe; coaxial probe; critical value; cutoff; electrode erosion; eroded mass; high-frequency field; high-frequency fields; high-frequency generator; high-frequency plasma discharge; high-frequency power injection effect; plasma instabilities; plasma sheath; polished probe electrodes; unipolar arc behavior; unipolar arcs; vacuum arc plasma; zero frequency; Cathodes; Electrodes; Electrons; Plasma applications; Plasma devices; Plasma measurements; Plasma properties; Plasma sheaths; Probes; Sputtering;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2003.808862
Filename
1190693
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