DocumentCode :
1170264
Title :
Unipolar arc behavior in high-frequency fields
Author :
Levchenko, Igor ; Voloshko, A. ; Keidar, Michael ; Beilis, Isak I.
Author_Institution :
Kharkov Nat. Aerosp. Univ., Ukraine
Volume :
31
Issue :
1
fYear :
2003
fDate :
2/1/2003 12:00:00 AM
Firstpage :
137
Lastpage :
141
Abstract :
In the present paper, we describe experimental investigations of unipolar arcs generated in a vacuum arc plasma. An effect of additional injection of the high-frequency power is studied. A coaxial floating arc probe of special design is used for the arc characteristic measurements, and the arc tracks on the polished probe electrodes are studied. The breakdown rate of the probe in the high-frequency plasma discharge is found to have an abrupt cutoff with a frequency approaching the critical value of about 107 Hz. Independent measurement of electrode erosion confirms this effect. The eroded mass reaches the value of 10-12 kg·s-1 for zero frequency and falls to the value of 10-13 kg·s-1 for frequency approaching 107 Hz.
Keywords :
plasma probes; plasma sheaths; vacuum arcs; 10000000 Hz; arc characteristic measurements; arc tracks; breakdown rate; cathode spot initiation; coaxial floating arc probe; coaxial probe; critical value; cutoff; electrode erosion; eroded mass; high-frequency field; high-frequency fields; high-frequency generator; high-frequency plasma discharge; high-frequency power injection effect; plasma instabilities; plasma sheath; polished probe electrodes; unipolar arc behavior; unipolar arcs; vacuum arc plasma; zero frequency; Cathodes; Electrodes; Electrons; Plasma applications; Plasma devices; Plasma measurements; Plasma properties; Plasma sheaths; Probes; Sputtering;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2003.808862
Filename :
1190693
Link To Document :
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