• DocumentCode
    1170494
  • Title

    RF performance and modeling of Si/SiGe resonant interband tunneling diodes

  • Author

    Jin, Niu ; Chung, Sung-Yong ; Yu, Ronghua ; Di Giacomo, Sandro J. ; Berger, Paul R. ; Thompson, Phillip E.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Ohio State Univ., Columbus, OH, USA
  • Volume
    52
  • Issue
    10
  • fYear
    2005
  • Firstpage
    2129
  • Lastpage
    2135
  • Abstract
    The RF performance of two different Si-based resonant interband tunneling diodes (RITD) grown by low-temperature molecular beam epitaxy (LT-MBE) were studied. An RITD with an active region of B δ-doping plane/2 nm i-Si0.5Ge0.5/1 nm i-Si/P δ-doping plane yielded a peak-to-valley current ratio (PVCR) of 1.14, resistive cutoff frequency (fr0) of 5.6 GHz, and a speed index of 23.3 mV/ps after rapid thermal annealing at 650°C for 1 min. To the authors´ knowledge, these are the highest reported values for any epitaxially grown Si-based tunnel diode. Another RITD design with an active region of 1 nm p+ Si0.6Ge0.4/B δ-doping plane/4-nm iSi0.6Ge0.4/2 nm i-Si/P δ-doping plane and annealed at 825°C for 1 min had a PVCR of 2.9, an fr0 of 0.4 GHz, and a speed index of 0.2 mV/ps. A small signal model was established to fit the measured S11 data for both device designs. Approaches to increase fr0 are suggested based on the comparison between these two diodes. The two devices exhibit substantially different junction capacitance/bias relationships, which may suggest the confined states in the δ-doped quantum well are preserved after annealing at lower temperatures but are reduced at higher temperature annealing. A comprehensive dc/RF semi-physical model was developed and implemented in Agilent advanced design system (ADS) software. Instabilities in the negative differential resistance (NDR) region during dc measurements were then simulated.
  • Keywords
    Ge-Si alloys; molecular beam epitaxial growth; rapid thermal annealing; resonant tunnelling diodes; semiconductor device models; silicon; 1 min; 5.6 GHz; 650 C; 825 C; Agilent advanced design system; RF performance; Si-SiGe; dc/RF semi-physical model; junction capacitance/bias relationships; molecular beam epitaxy; negative differential resistance; rapid thermal annealing; resonant interband tunneling diodes; small signal model; Annealing; Diodes; Germanium silicon alloys; Molecular beam epitaxial growth; Radio frequency; Resonance; Semiconductor process modeling; Silicon germanium; Temperature; Tunneling; Modeling; RF performance; Si/SiGe heterojunction; molecular beam epitaxial (MBE) growth; tunnel diodes;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2005.856183
  • Filename
    1510900