Electron pulse generation at 64 GHz in scanning electron microscope

An electron beam chopping technique has been developed which enables the generation of electron pulses at tens of GHz in an SEM. This is effected by deflecting the beam in a circle and chopping it with a multislot aperture. Electron pulses have been produced at 64 GHz and measured, and a waveform measurement at 18 GHz demonstrates its potential application to electron beam characterisation of very high speed devices and MMICs.