DocumentCode :
1171456
Title :
Optimization of fluorine passivation of stainless steel surfaces
Author :
Maeno, Matagoro ; Nakagawa, Yoshinori ; Miki, Nobuhiro ; Ohmi, Tadahiro
Author_Institution :
Hashimoto Chem. Corp., Osaka, Japan
Volume :
5
Issue :
2
fYear :
1992
fDate :
5/1/1992 12:00:00 AM
Firstpage :
107
Lastpage :
113
Abstract :
The optimum conditions for the fluorine passivation of 316L stainless steel are described. The direct fluoridation products formed at temperatures of 320°C or lower are composed solely of FeF2 , while those which were formed at the temperatures of 330°C or higher have a compound-phase composition of FeF2 and FeF 3. At a critical temperature (400°C for 316L stainless steel) of the thermal modification process, FeF3 is converted to FeF2 and disappears completely as the temperature rises. Meanwhile, CrF3 is formed at a certain temperature (440°C for 316L stainless steel). The two-phase composition gets further crystallized as the thermal modification temperature rises. As the crystal growth induces the cracks on the fluoridated film, it is very difficult to form a satisfactory passivation film from the two-phase composition by thermal modification. It is confirmed that excellent passivation film has been obtained from the single-phase composition by the optimum fluoridation following the optimum thermal modification
Keywords :
corrosion protective coatings; fluorine; iron compounds; passivation; stainless steel; 316L stainless steel; 320 to 440 degC; CrF3; F passivation; FeCrC; FeF2; FeF2-FeCrC; FeF2-FeF3; fluoridation; fluoridation products; process optimisation; single-phase composition; thermal modification temperature; two-phase composition; Chemical technology; Cleaning; Crystallization; Passivation; Plasma temperature; Rough surfaces; Steel; Surface roughness; Surface treatment; Ultra large scale integration;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/66.136271
Filename :
136271
Link To Document :
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