• DocumentCode
    1171456
  • Title

    Optimization of fluorine passivation of stainless steel surfaces

  • Author

    Maeno, Matagoro ; Nakagawa, Yoshinori ; Miki, Nobuhiro ; Ohmi, Tadahiro

  • Author_Institution
    Hashimoto Chem. Corp., Osaka, Japan
  • Volume
    5
  • Issue
    2
  • fYear
    1992
  • fDate
    5/1/1992 12:00:00 AM
  • Firstpage
    107
  • Lastpage
    113
  • Abstract
    The optimum conditions for the fluorine passivation of 316L stainless steel are described. The direct fluoridation products formed at temperatures of 320°C or lower are composed solely of FeF2 , while those which were formed at the temperatures of 330°C or higher have a compound-phase composition of FeF2 and FeF 3. At a critical temperature (400°C for 316L stainless steel) of the thermal modification process, FeF3 is converted to FeF2 and disappears completely as the temperature rises. Meanwhile, CrF3 is formed at a certain temperature (440°C for 316L stainless steel). The two-phase composition gets further crystallized as the thermal modification temperature rises. As the crystal growth induces the cracks on the fluoridated film, it is very difficult to form a satisfactory passivation film from the two-phase composition by thermal modification. It is confirmed that excellent passivation film has been obtained from the single-phase composition by the optimum fluoridation following the optimum thermal modification
  • Keywords
    corrosion protective coatings; fluorine; iron compounds; passivation; stainless steel; 316L stainless steel; 320 to 440 degC; CrF3; F passivation; FeCrC; FeF2; FeF2-FeCrC; FeF2-FeF3; fluoridation; fluoridation products; process optimisation; single-phase composition; thermal modification temperature; two-phase composition; Chemical technology; Cleaning; Crystallization; Passivation; Plasma temperature; Rough surfaces; Steel; Surface roughness; Surface treatment; Ultra large scale integration;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/66.136271
  • Filename
    136271